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Copper Interconnect Technology by Tapan Gupta







Tapan Gupta, "Copper Interconnect Technology"
Publisher: Springer | ISBN: 1441900756 | edition 2009 | PDF | 423 pages | 8.4 mb

Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology.



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