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ULSI Semiconductor Technology Atlas by Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu

Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu, "ULSI Semiconductor Technology Atlas"
Publisher: W,l,y-Int,rs,ien,e | ISBN: 0471457728 | 2003 | PDF | 666 pages | 26 MB
More than 1,100 TEM images illustrate the science of ULSI
The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems.






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