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CMOS Hotplate Chemical Microsensors by Markus Graf, Diego Barrettino, Henry P. Baltes

Markus Graf, Diego Barrettino, Henry P. Baltes, "CMOS Hotplate Chemical Microsensors"
Publisher: Springer | ISBN: 3540695613 | edition 2007 | PDF | 125 pages | 3.3 mb

The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.



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